• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    A spool valve in which the destruction of the sealing member (9) by radicals can be suppressed and in which the sealing member (9) can be prevented from being released from a dovetail groove. A seal groove (10) for fixing a seal member (9) is formed of a first groove portion (11) having a rectangular cross section and a second groove portion (12) provided in the bottom wall of the first groove portion and having a dovetail groove-shaped cross section , The seal member (9) is held in the second groove portion (12) with a part thereof protruding into the first groove portion (11). A valve seat (7), which can be brought in and out in the sealing groove (10) to come into and out of contact with the sealing element (9), protrudes from the inner surface of a partition wall (3a) in which a valve opening (2) is provided.
    公开号:CH709767B1
    申请号:CH00786/15
    申请日:2015-06-02
    公开日:2017-01-31
    发明作者:Ishigaki Tsuneo；Shimoda Hiromi；Ogawa Hiroshi
    申请人:Smc Corp；
    IPC主号:
    专利说明:

    Technical area
    The present invention relates to a spool valve provided between a process chamber and a transfer chamber of a processing apparatus such as a semiconductor processing apparatus or a liquid crystal processing apparatus, and for opening and closing a valve opening connecting the process chamber and the transfer chamber. is used.
    State of the art
    A gate valve is used, for example, in a processing apparatus that performs processing such as etching with a radical of fluorine (F) or oxygen (O) on a workpiece, such as a semiconductor wafer or a liquid crystal substrate a process chamber which is evacuated and into which a process gas is introduced and which gate valve has the task of opening the valve opening when the workpiece is brought into and out of the chamber and hermetically closing it during processing in the chamber. In general, this type of spool valve is configured such that a sealing member such as an O-ring is mounted in an annular dovetail groove formed in a valve plate, and the valve port is opened and closed by bringing this sealing member into and out of contact with a valve seat is, which is provided around the valve opening.
    Now, it is known that, in a gate valve having such a configuration, the radicals generated in a hermetically sealed chamber during machining act on the seal member through a gap between the valve plate and a side wall in which the valve opening is provided Destruction of the sealing element is accelerated and particles are generated. Attempts to prevent the destruction of the seal member due to the radicals are disclosed in PTL 1 (Patent Literature 1) and PTL 2 (Patent Literature 2).On the other hand, and to achieve a more reliable sealing of the valve opening, measures are also desired to more reliably prevent the sealing element from becoming detached from a dovetail groove.
    patent literature
    [PTL 1] Japanese Unexamined Patent Application Publication No. 2002-217137.[PTL 2] Japanese Unexamined Patent Application Publication No. 2006-5008.
    Summary of the invention
    Technical problem
    The technical object of the present invention is to provide a slide valve with which the destruction of a sealing element can be prevented by radicals and can be prevented that the sealing element dissolves from a dovetail groove.
    the solution of the problem
    In order to solve the above technical problem, the spool valve according to the present invention comprises a valve port in a partition wall connecting to a process chamber, and a valve plate which can come into and out of contact with the valve port to open the valve port and close. A valve seat is provided in the partition wall around the valve opening, and the valve plate has a valve plate body having a seal groove at a position corresponding to the valve seat, and has a seal member mounted in the seal groove. The entirety of the sealing element is held in the sealing groove. The valve seat protrudes from the inner surface of the partition wall, toward the valve plate, has a valve seat surface at its distal end, with which the sealing member is brought into and out of contact, and has a width which is smaller than the opening width of the seal groove. When the valve plate is in a position hermetically closing the valve opening, the distal end portion of the valve seat is in the seal groove, and the valve seat surface hermetically abuts against the seal member in the seal groove.
    In a shut-off valve according to the present invention, the seal groove is formed of a first groove portion which opens to a sealing surface of the valve opening opposite the valve body valve body, and has a groove width which is uniform in the depth direction and a dovetail groove-shaped second groove portion, which opens substantially in the center of the bottom wall of the first groove portion and whose opening width is smaller than the groove width of the first groove portion, and a sealing member having a width which is greater than the opening width of the second groove portion, and a height which is greater as the depth of the second groove portion and with a part thereof is fixed in the second groove portion and protrudes into the first groove portion.In a preferred embodiment, the surface of the part of the seal member which projects into the first groove portion is formed to form a convexly curved surface, and the valve seat face is formed to form a flat surface.Preferably, the groove width of the first groove portion is less than or equal to twice the opening width of the second groove portion.
    In a second embodiment of the shut-off valve according to the present invention, the seal groove is formed of a single recessed groove which opens to a sealing surface of the valve body which faces the valve opening and has a groove width uniform in the depth direction, and wherein the sealing member is inserted in this recessed groove.In a preferred embodiment, a surface of the sealing member opposite the valve seat surface is shaped to form a flat surface, and the valve seat surface is shaped to form a convexly curved surface.
    In a preferred embodiment of the spool valve according to the present invention, when the valve plate is in the valve opening hermetically closing position, a straight line which contacts both an opening edge of the valve opening on the inside of the partition and the surface of the valve seat, the is in contact with the valve plate body, or cuts it between these contact points.
    Advantageous Effects of the Invention
    Thus, the spool valve according to the present invention is formed so that the entire sealing member is always in the sealing groove, and when the valve opening is hermetically sealed, the valve seat protrudes from the inner surface of the partition into the sealing groove and hermetically abuts the sealing member in the sealing groove. Therefore, when the valve hole is hermetically sealed, the seal member is surrounded by the seal groove and the valve seat, and most of the radicals entering the space between the valve plate and the partition wall from the valve opening side repeatedly collide with the valve plate, the partition wall or the valve seat and are prevented from reaching the sealing element. As a result, destruction of the seal member due to free radicals is prevented. In addition and at the same time, the sealing element is prevented from detaching from the sealing groove.In particular, according to the spool valve according to claim 6, radicals can be prevented from directly reaching the sealing member through the valve hole, and therefore the destruction of the sealing member caused by radicals can be prevented more reliably.
    Brief description of the drawings
    [0011]<Tb> FIG. 1 <SEP> is a schematic sectional view showing a state in which, in a spool valve according to a first embodiment of the present invention, a valve plate is in an intermediate position in which the valve plate is vertically separated from a valve port.<Tb> FIG. 2 <SEP> is a schematic sectional view showing a state in which, in the slider valve according to the first embodiment of the present invention, the valve plate is in a hermetically closing position in which the valve plate hermetically closes the valve hole.<Tb> FIG. 3A <SEP> is an enlarged view of a section A of FIG. 1 and FIG<Tb> FIG. 3B <SEP> is an enlarged view of a portion B of FIG. 2.<Tb> FIG. 4 <SEP> includes enlarged sectional views of the main part of a valve spool according to a second embodiment of the present invention,<Tb> FIG. 4A <SEP> shows a state in which a valve plate is in an intermediate position in which the valve plate is vertically separated from a valve port, and<Tb> FIG. 4B <SEP> shows a state in which the valve plate is in a hermetically closing position in which the valve plate hermetically closes the valve hole.
    Description of the embodiments
    A first embodiment of a spool valve according to the present invention will be described with reference to FIGS. 1, 2 and 3. This slide valve 1 has a substantially rectangular parallelepiped-shaped hollow valve housing 3, with a valve opening 2 for connection to a process chamber (not shown), a valve plate 4, which is arranged in this valve housing 3, a valve stem 5, at its distal end the Valve plate 4 is mounted and its proximal end protrudes through the valve housing 3 to the outside of the valve housing 3, and a valve drive mechanism 60 which is connected to the proximal end of the valve stem 5 to move the valve plate to open the valve opening 2 and close , By driving the valve movement mechanism 60 by means of a drive member such as an air cylinder (not shown), the valve plate 4 is between a fully open position shown with a dashed line in FIG. 1, in which the valve plate 4 fully opens the valve opening, and a hermetically closing position, as shown in Fig. 2, in which the valve plate 4 hermetically closes the valve opening 2, via an intermediate position, as shown in Fig. 1 with a solid line in which the valve plate 4 is separated from the valve opening 2 and opposite her, is moved back and forth.
    The valve housing 3 has opposing first and second front and rear partitions 3a and 3b. Of these partitions, the first partition wall 3a is provided with the valve opening 2 having a horizontal elongated, substantially rectangular shape, and the second partition wall 3b is provided with a rear opening 6 which, similarly, at a position opposite to the valve opening 2 , has a substantially rectangular shape. An annular valve seat 7 is formed on the inner surface 3 c of the first partition wall 3 a to enclose the valve port 2.
    On the other hand, the valve plate 4 has a valve plate body 8 which is formed in a substantially rectangular plate-shaped shape, which is larger in the vertical and horizontal dimension than the valve opening 2, and which has a substantially flat sealing surface 8a on its the valve opening 2, and an annular sealing member 9 fixed to the sealing surface 8a of the valve body 8, which moves with the valve plate 4 into and out of contact with a valve seat surface 7a of the valve seat 7, thereby opening and closing the valve opening.
    Here, the valve plate body 8, at a position in the sealing surface 8a, which corresponds to the valve seat 7, an annular sealing groove 10 to mount the sealing member 9 and fasten, and which at its the sealing surface 8a opposite back with the valve stem 5 by means of a suitable fastening means (not shown) is attached.The sealing member 9 is integrally formed of an elastic body (elastomer) such as rubber, and has a uniform cross section over its entire circumference. Similarly, the seal groove 10 for inserting and fixing the seal member 9 also has a uniform cross-section over its entire circumference.
    The valve drive mechanism 60 has a block-like lever member 61 which is connected to the proximal end of the valve stem 5 outside the valve housing 3, has a pair of left and right first and second cam rollers 62a and 62b, which on both the left and right side surfaces of the lever member 61 and fixed along the axis of the valve rod 5, a pair of left and right first and second guide rollers 63a and 63b, which are fixedly arranged along the axis of the valve stem 5 and relative to the valve housing 3, and a cam frame 66, which is formed by connecting to the ends of a pair of left and right cam plates 64, which are respectively opposed to the left and right side surfaces of the lever member, and to a connecting plate 65.
    The cam plates 64 are provided with first and second cam grooves 67a and 67b for slidably mounting the first and second cam rollers 62a and 62b, and a guide groove 68 for slidably mounting the first and second guide rollers 63a and 63b.Here, the first and second cam grooves 67a and 67b are inclined toward the valve opening 2 side and extending from the distal side end to the proximal end side of the valve stem 5. On the other hand, the guide groove 68 linearly extends along the axis of the valve stem 5 and becomes wide first guide groove portion 68a disposed at the distal end thereof and a narrow second guide groove portion 68b formed continuously on the proximal side end thereof. The first guide roller 63a is slidably mounted in the first guide groove portion 68a, and the second guide roller 63b is slidably fitted in the second guide groove portion 68b. Therefore, the first guide roller 63a is formed larger in diameter than the second guide roller 63b.
    The connecting plate 65 of the cam frame 66 and the lever member 61 are connected by an elastic link 69, such as a coil spring, so as to be in the axial direction of the valve stem 5 (the vertical direction in the figure) and in a direction perpendicular thereto (FIG. the horizontal direction in the figure) are relatively movably connected. The connecting plate 65 of the cam frame 66 is connected to the driving part (not shown), so that the cam frame 66 is reciprocally movable along the axial direction of the valve stem 5.
    The operation of the spool valve will be described with reference to FIGS. 1 and 2.First, starting from a state in which the valve plate 4 is in the intermediate position, as shown by the solid line in FIG. 1, the cam frame 66 is moved in the direction of the proximal end of the valve stem 5 (downward in the figure) Also, the cam frame 66 moves in the same direction while being guided by the guide rollers 63a and 63b and the guide groove 68. Here, the lever member 61, which is connected to the cam frame 66 and fixed to the valve stem 5, also moves with the cam frame 66 in the same direction. Thereby, the positions of the cam rollers 62a and 62b in the cam grooves 67a and 67b are not changed. As a result, the valve plate 4 is displaced from the intermediate position, along the axis of the valve stem 5, and in the same direction as the lever member 61, and moves to the fully opened position as shown by the broken line in FIG.
    On the other hand, starting from a state in which the valve plate 4 is in the intermediate position shown by the solid line in Fig. 1, the cam frame is moved in the direction of the distal end of the valve stem 5 (upward in the figure), in which intermediate position the lever element 61 is prevented from moving in the direction of the distal end of the valve stem 5 by a stop mechanism (not shown), whereby, as shown in Fig. 2, only the cam frame 66 towards the distal end of the valve stem 5, and thereby compresses the elastic connecting member 69 between itself and the lever member 61. Here, together with the cam rollers 62a and 62b, the lever member 61 is slid toward the valve hole 2 while being guided by the cam grooves 67a and 67b and the elastic connecting member 69 inclines. Thereby, the valve plate 4 is displaced perpendicular to the axis of the valve stem 5 toward the side of the valve port 2, and the seal member 9 is pressed against the valve seat 7, and the valve port 2 is thereby hermetically sealed.
    Now, and as shown in Fig. 3, in the slide valve 1 according to the first embodiment, the seal groove 10 which is formed in the valve plate body 8, by a first groove portion 11 which opens to the sealing surface 8a of the valve body 8, and a second groove portion 12 which opens to the bottom wall 11 a of the first groove portion 11 is formed.The first groove portion 11 has a rectangular cross section with a depth H1 from the opening thereof to the bottom wall 11a, and a uniform groove width W1 thereof over the entire depth direction thereof.However, in the present application, the term "rectangle" in the ordinary technical understanding of constructions or manufacturing methods is intended to encompass those having curved surfaces or bevelled surfaces at their corners, and therefore the groove width W1 will not necessarily have to be strictly uniform, especially in the edge regions to the sealing surface 8a and the bottom wall 11a.
    On the other hand, the second groove portion 12, which is provided substantially at the center in the width direction of the bottom wall 11 a of the first groove portion 11, an opening width W21 which is smaller than the groove width W1, and is formed in a dovetail groove shape is symmetrical in the width direction. That is, the second groove portion 12 is formed so that the groove width thereof increases in its depth direction and reaches the maximum width W22 substantially at its center in the depth direction. Here, the depth H2 of the second groove portion 12 is larger than the depth H1 of the first groove portion 11, and the maximum width W22 of the second groove portion 12 is smaller than the groove width W1 of the first groove portion 11. However, the groove width W1 of the first groove portion 11 is preferably smaller as twice the opening width W21 of the second groove portion 12.
    The seal member 9 is an O-ring having a circular cross section and is fixed in such a manner that the entirety thereof is received in the seal groove. Specifically, the sealing member 9 is mounted in the second groove portion 12 in such a manner that the outer peripheral surface thereof abuts against the bottom wall 12b of the second groove portion 12 and engages opposite opening edges 12a of the second groove portion 12 and a part thereof projects into the first groove portion 11 , That is, in such a fixed state, the surface of that part of the seal member 9 protruding into the first groove portion 11 forms a convexly curved surface, and the thickness H3 of the seal member 9 is equal to the sum of the depths H1 and H2 of the first and second Groove portions 11 and 12 (the depth of the seal groove) are, as shown in Fig. 3, or smaller than the sum thereof and larger than the depth H2 of the second groove portion 12. The width W3 of the seal member is smaller than the maximum width W22 of the second groove portion 12 and larger than the opening width W21 thereof.
    The valve seat 7 projects from a position on the inner surface 3c of the first partition wall 3a at a distance C from the opening edge 2a of the valve opening 2 vertically toward the valve plate 4, and the cross section thereof is in a rectangular shape having a width W4 and a height H4 formed. That is, the valve seat 7 has a width W4 that is uniform in the direction of the height and has a height H4 that is uniform in the width direction, and the valve seat surface 7a with which the seal member 9 comes in and out of contact. is shaped so that it forms a flat surface parallel to the sealing surface 8a.Hereby, the center of the valve seat 7 corresponds to the center of the seal groove 10, and the width W4 of the valve seat 7 is made smaller than the width W1 of the first groove portion of the seal groove 10.
    Therefore, the valve seat 7 brings the valve seat surface 7a into close contact with the seal member 9 when the valve moving mechanism 60 is driven to move the valve plate 4 from the intermediate position shown in Fig. 3A to the hermetically closing position 3B, and is shown in Figs introduced the first groove portion 11 of the seal groove 10 and presses against resp. deforms the sealing element 9 in the second groove portion 12 elastically. In this hermetically sealed state, a gap D is formed between the sealing surface 8a of the valve plate body 8 and the inner surface 3c of the first partition wall 3a, and the distal end portion of the valve seat 7 is in the first groove portion 11, and the valve seat surface 7a hermetically abuts against the sealing member 9 the first groove portion 11.
    Now, when a straight line L1 contacts both the opening edge 2a of the valve opening 2 and the surface of the valve seat 7 and the valve body 8 passes between these contact points 2a and 7b, as in Fig. 3B by the long dashed - double dashed line or contacting the surface of the valve plate body 8, it is possible to prevent radicals R from entering the space between the sealing surface 8a of the valve plate body 8 and the inner surface 3c of the first partition wall 3a through the valve opening 2 and reaching the sealing member 9 directly.The height H4 of the valve seat 7 in this embodiment need only be made larger than the gap D plus the difference between the depth H1 + H2 of the seal groove 10 and the height H3 of the seal member, that is, D + ((H1 + H2) - H3 ). The opening width W1 of the seal groove 10 is preferably smaller than or equal to twice the width W4 of the valve seat 7.
    In such a hermetically closed state of the access opening 2, the sealing element 9 is surrounded by the seal groove 10 and the valve seat 7. Therefore, when radicals R enter the space between the sealing surface 8a and the inner surface 3c of the first partition wall 3a through the valve port 2 as shown by the broken line in Fig. 3B, most of the radicals R repeatedly collide with the sealing surface 8a of the valve plate body 8, the inner surface 3 c of the partition wall 3 a or with the side surface of the valve seat 7 and these are prevented from reaching the sealing element 9. As a result, the destruction of the seal member 9 by radicals R can be suppressed.At the same time, the entire seal member 9 is always held in the seal groove 10 and will bring the valve seat 7a into close contact with the seal member 9 when hermetically closing the valve opening 2, and is inserted in the first groove portion 11 of the seal groove 10, thereby applying pressure to the valve seat Seal member 9 in the second groove portion 12. Therefore, the seal member 9 can also be prevented from coming off the seal groove 10.
    Next, a second embodiment of a spool valve according to the present invention will be described with reference to FIG. 4. The only difference between the spool valve according to the first embodiment and the spool valve according to the second embodiment resides in the sealing members thereof as shown in Figs. 3 and 4, and the basic configuration and operation of the second embodiment are the same as those of the first embodiment. as shown in Figs. 1 and 2, so that the description is omitted here. The same reference numerals are used to designate the same components as those of the seal member of the first embodiment and as shown in Fig. 3, and the specific description thereof will be omitted here to avoid repetition.
    In the slide valve according to the second embodiment, a seal groove 20 is formed from a single recessed groove which opens against a, a valve opening 2 opposite, sealing surface 8a of a valve body 8 towards. The seal groove 20 has a rectangular cross section, a depth H5 from the opening thereof to the bottom wall 20a, and a uniform groove width W5 over the entire depth direction thereof.
    In the seal groove 20, a sealing member 29 is inserted in a similar manner, with a rectangular cross section, wherein the entirety of its side surfaces and the bottom surface are in close contact with the inner walls of the sealing groove 20, and its upper side is shaped so that this one flat surface parallel to the sealing surface 8a and lies in the seal groove 20. This means that the sealing element 29 in the attached state has the same width as the groove width W5 of the sealing groove. Here, the thickness H6 from the upper surface to the lower surface of the seal member 29 is smaller than the depth H5 of the seal groove 20, and therefore the entirety of the seal member 29 is accommodated in the seal groove 20. The seal member 29 is preferably slightly wider than the width of the seal groove 20 to improve the close contact with the inner surface of the seal groove 20.
    On the other hand, a valve seat 27 protrudes from a position similar to that in the first embodiment, vertically toward the valve plate 4, the cross section thereof being formed to have a width W7 and a height H7, and a valve seat surface 27a disposed at the distal end thereof and facing the upper surface of the seal member 29, and forms a convexly curved surface. Specifically, the valve seat 27 is constituted by a proximal portion 27b having a width W7 extending uniformly in the direction of height and having a rectangular cross section and having a distal end portion 27c having a convexly curved surface peaking at the center reached in the width direction.Here, the center of the valve seat 27 corresponds to the center of the seal groove 20, and the width W7 of the valve seat 27 is smaller than the width W5 of the seal groove 20. The height H7a of the proximal portion 27b of the valve seat 27 is preferably larger than a gap D at one Hermetically closed state, which will be described later in detail.
    Therefore, when the valve moving mechanism 60 is driven to displace the valve plate 4 from the intermediate position, as shown in Fig. 4A, in a hermetically closed position, as shown in Fig. 4B, the valve seat 27 is inserted into the Seal groove 20, brings the valve seat surface 27a into close contact with the upper surface of the seal member 29, and presses and deforms the seal member 29 elastically against the bottom wall 20a of the seal groove 20. In this hermetically closed state, as in the first embodiment, a gap D At least the distal end portion 27 c of the valve seat 7 is inserted into the seal groove 20, and the valve seat surface 27 a hermetically abuts the seal member 29 in the seal groove 20.
    When, as here, and as in the first embodiment, a straight line L2 contacting both the opening edge 2a of the valve opening 2 and the surface of the valve seat 27 passes through the valve plate body 8 between these contact points 2a and 27b, as in FIG Fig. 4B is shown with long and double-dashed line, or is in contact with the surface of the valve plate body 8, radicals R can be prevented from the sealing member 9, through the valve opening 2 and the space between the sealing surface 8a of the valve body 8 and the inner surface 3c of the first partition wall 3a to reach directly. It is particularly preferable that the straight line L2 passes through the boundary between the proximal portion 27b and the distal end portion 27c of the valve seat 27 instead of the contact point 27b with the valve seat 27.The height H7 of the valve seat 27, in this embodiment, need only be greater than the gap D plus the difference between the depth H5 of the seal groove 20 and the height H6 of the seal member, that is, D + (H5-H6). The opening width W5 of the seal groove 20 is preferably smaller than or equal to twice the width W7 of the valve seat 27.
    Also in this hermetically closed state of the access opening 2, as in the first embodiment, when radicals R enter the space between the sealing surface 8a and the inner surface 3c of the first partition wall 3a through the valve port 2, as indicated by the broken line in FIG 4B, most of these radicals R repeatedly collide with the sealing surface 8a of the valve plate body 8, the inner surface 3c of the partition wall 3a or the side surface of the valve seat 27, and are prevented from reaching the sealing member 29. As a result, the destruction of the seal member 29 due to the radical R can be prevented.At the same time, the entire seal member 29 is always surrounded by the seal groove 20, and when hermetically closing the valve hole 2, the valve seat 27 is inserted with its distal end first into the seal groove 20, the valve seat surface 27a is brought into close contact with the seal member 29 and pushes Seal member 29 against the bottom wall 20 a of the seal groove 20. Thereby, the seal member 29 can be prevented from detaching from the seal groove 20.
    LIST OF REFERENCE NUMBERS
    [0035]<Tb> 1: <September> slide valve<Tb> 2: <September> valve opening<tb> 2a: <SEP> Opening edge (contact point)<Tb> 3: <September> valve housing<tb> 3a: <SEP> first partition<tb> 3b: <sep> second partition<Tb> 3c: <September> inner surface<Tb> 4: <September> valve plate<Tb> 5: <September> valve stem<tb> 7, 27: <SEP> Valve seat<tb> 7a, 27a: <SEP> Valve seat surface<tb> 7b, 27b: <SEP> Contact Point<Tb> 8: <September> valve plate body<Tb> 8: <September> sealing surface<tb> 9, 29: <SEP> Sealing element<tb> 10, 20: <SEP> Sealing groove<Tb> 20 <September> bottom wall<tb> 11: <SEP> first groove portion<Tb> 11 <September> bottom wall<tb> 12: <SEP> second groove section
    权利要求:
    Claims (3)
    [1]
    A spool valve comprising a partition wall (3a) having a valve port (2) for communicating with a process chamber; a valve plate (4) engageable with and out of contact with the valve port (2) to open and close the valve port (2); a valve seat (7) which extends around the valve opening (2) in the partition wall (3a); the valve plate (4) having a valve plate body (8) with a seal groove (10) at a position corresponding to the valve seat (7) and a seal member (9) fixed in the seal groove (10),wherein the seal groove (10) is formed of a first groove portion (11) opening to a seal face (8a) of the valve plate body (8) opposite to the valve hole (2) and having a groove width (W1) is uniform in the depth direction,and a dovetail groove-shaped second groove portion (12) opening substantially toward the center of the bottom wall (11a) of the first groove portion (11) and having an opening width (W21) smaller than the groove width (W1) of the first groove portion (11) ), andwherein the sealing element (9) has a width (W3) which is greater than the opening width (W21) of the second groove portion (12) and a height (H3) which is greater than the depth (H2) of the second groove portion (12 ), wherein the sealing member (9) in the second groove portion (12) is inserted so that it does not exceed the sealing surface (8a) of the valve plate body (8), and a part of the sealing element (9) protrudes into the first groove portion (11) .the valve seat (7) protruding from the inner surface of the partition wall (3a) in the direction of the valve plate (4) and having at its distal end a valve seat surface (7a) to which the sealing element (9) can be brought into and out of contact, and which has a width (W4) which is smaller than the opening width (W1) of the seal groove (10), andwherein, when the valve plate (4) is in a hermetically closing position of the valve port (2), the distal end portion of the valve seat (7) protrudes into the seal groove (10), and the valve seat surface (7a) hermetically seals to the seal member (9) the sealing groove (10) abuts.
    [2]
    A spool valve according to claim 1, wherein the surface of the part of the seal member (9) projecting into the first groove portion (11) is shaped to form a convexly curved surface, and the valve seat surface (7a) is shaped that this forms a flat surface.
    [3]
    3. slide valve according to one of claims 1 or 2, wherein, when the valve plate (4) in which the valve opening (2) is hermetically closing position, a straight line (L1) which both a contact point (2a) of the opening edge of the valve opening ( 2) on the inner side of the partition wall (3a) as well as a contact point (7b) of the valve seat (7) touched, the valve body (8) between these contact points (2a, 7b) touches or cuts.
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    US20150369374A1|2015-12-24|
    US9482350B2|2016-11-01|
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    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    JP2014117035A|JP6160926B2|2014-06-05|2014-06-05|Gate valve|
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